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Compact Fiber-Coupled Three Degree-of-Freedom Displacement Interferometry for Nanopositioning Stage Calibration

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Compact Fiber-Coupled Three Degree-of-Freedom Displacement Interferometry for Nanopositioning Stage Calibration

  • Optics

This paper presents a compact heterodyne system capable of simultaneously measurement Z-displacement along with changes in pitch and yaw using a single measurement beam incident on a plane mirror target.

Published in: Measure Science and Technology

Year: 2014

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