Knowledge Base

Discussion of challenges such as attraction forces in micro metrology and the use of standing wave sensors to overcome these technical challenges for dimensional metrology and scanning.

Published in: NCSL International

Year: 2007

Introduction to standing wave probes for micrometrology.

Published in: Precision Engineering Conference

Year: 2005

This proceedings paper discusses employing standing wave sensors for 3D surface profilometry.

Published in: Multi-Material Micromanufacturing Conference

Year: 2009