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Development of a Compact, Fiber-Coupled, Six-Degree-of-Freedom Measurement System for Precision Linear Stage Metrology

  • Knowledge Base

    • Damping
    • Macroscale Metrology
    • Mechatronics
    • Microfluidics
    • Microscale Assembly
    • Microscale Metrology
    • Ultra Precision Rotary Axis

Development of a Compact, Fiber-Coupled, Six-Degree-of-Freedom Measurement System for Precision Linear Stage Metrology

  • Optics

This paper addresses a novel laser interferometer used to simultaneously measure linear and 5 abbe errors in precision motion control stages.

Published in: Review of Scientific Instruments

Year: 2016

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