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Standing Wave Probes for Micro Assembly

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    • Damping
    • Macroscale Metrology
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    • Microfluidics
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    • Microscale Metrology
    • Ultra Precision Rotary Axis

Standing Wave Probes for Micro Assembly

  • Microscale Assembly

This paper discusses the use of standing wave probes as pick and place tools in microassembly applications.

Published in: Review of Scientific Instruments

Year: 2009

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